Single Wafer Bake Equipment
Automated vacuum bake track systems suitable for substrates of all sizes, shapes and materials. Includes GUI controls with unlimited recipes, data capture, and network capability. These are safe, reliable FAB proven tools that come with an industry leading 3 Year Warranty
Ideal for any semiconductor related single wafer baking and curing application. Can replacing low temperature batch furnace processes.
Semiconductor Fabrication
Products and Services
Single Wafer Vacuum Bake
Polyimide or Specialty Bake Equipment
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